Integrated circuit comprising a thermal conductivity based gas sensor

摘要

An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate. The integrated circuit also includes a relative humidity sensor on the substrate. The relative humidity sensor includes a first sensor electrode, a second sensor electrode, and a humidity sensitive layer covering the first and second electrodes. The integrated circuit further includes a thermal conductivity based gas sensor on the substrate. The thermal conductivity based gas sensor has an electrically resistive sensor element located above the humidity sensitive layer.

主权项

1. An integrated circuit comprising:
a semiconductor substrate; a relative humidity sensor on the substrate, the relative humidity sensor comprising a first sensor electrode, a second sensor electrode, and a humidity sensitive layer covering the first and second electrodes; and a thermal conductivity based gas sensor on the substrate, the gas sensor having an electrically resistive sensor element located above the humidity sensitive layer, wherein the electrically resistive sensor element is located on an upper surface of the humidity sensitive layer.