| 摘要 |
PROBLEM TO BE SOLVED: To provide a signal processing apparatus for X-ray analysis which is capable of easily and accurately selecting a time constant set value with a smaller amount of circuitry.SOLUTION: A signal processing apparatus 60 for X-ray analysis includes a differentiation circuit 42 which converts a staircase wave detected by an X-ray detector to a differentiated wave, a digital filter 61 which uses a time constant set value to convert the differentiated wave to a trapezoidal wave or a triangular wave, and a peak detector unit 62 which discriminates and counts crest values of peaks in the trapezoidal wave or the triangular wave. The signal processing apparatus 60 for X-ray analysis further includes: a storage unit 71 in which trapezoidal waves and triangular waves into which the differentiated wave is converted in the digital filter by using a plurality of time constant provisional set values are stored; a flat part calculation unit 72 which obtains front-side flat parts and rear-side flat parts of peaks; a difference value calculation unit 73 which calculates difference values between the front-side flat parts and the rear-side flat parts; and a selection unit 74 which selects at least one of the plurality of time constant provisional set values on the basis of the difference values and uses the selected time constant provisional set value to set the time constant set value. |
