| 摘要 |
PROBLEM TO BE SOLVED: To provide a load port device in which an opening cover is arranged and an influence of the opening cover to the operation range of a robot in a micro space is minimized.SOLUTION: In a load port device, there are arranged a cover member arranged in a micro space to surround an opening and partitioning a part of the micro space as a second micro space, a gas purge device capable of supplying gas into the second micro space, and a door drive mechanism for moving a door between a position facing the opening and a position not facing the opening. Furthermore, the cover member is moved together with the door by the door drive mechanism. |
