| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the number of dressing tools to be discarded after used as many as possible. <P>SOLUTION: A dressing device performs dressing by relatively rotating and moving a dressing tool 35 and a polishing pad 15 in a state that the dressing tool 35 contacts with a pad surface of the polishing pad 15. The dressing device is provided with a dressing control part 72 for adjusting a dressing condition of the polishing pad by the dressing tool, and a measurement control part 73 for measuring a dress rate of the polishing pad when performing an adjusting process for dressing a profile of the polishing pad in a desired profile by using the dressing tool to automatically adjust the dressing condition so as to make the measured dress rate coincide with a reference dress rate. <P>COPYRIGHT: (C)2008,JPO&INPIT |
