| 摘要 |
PROBLEM TO BE SOLVED: To improve the discharge efficiency in O3 generation process and reduce the generation cost by using a three-phase current inverter as a power source for applying a high-frequency high-voltage, transforming the output voltage of the inverter with a specific transforming means and supplying the transformed power between high-voltage electrodes and earthed electrodes of plural discharge tubes. SOLUTION: A plurality of discharge tubes each having a dielectric tube composed of a high-voltage electrode formed on the inner circumference of a tubular dielectric material and an earthed electrode tube placed around the dielectric tube interposing a gap from the outer circumference of the dielectric tube are arranged parallel to each other. A high-frequency high-voltage is applied between the high-voltage electrode and the earthed electrode of each discharge tube to generate O3 in a raw material gas flowing through the gap. In a silent discharge-type O3 generator having the above mechanism, a three-phase current inverter 11 composed of a rectifier part 12, a DC reactor 13 and an inverter part 14 is used as the power source, the output voltage of the inverter 11 is transformed by a booster transformer 15 having delta-ster connection and the output voltage of each phase is applied to each of sections obtained by dividing the plural discharge tubes into three sections. |
