发明名称 |
Rapid aging technique for aerogel thin films |
摘要 |
This invention pertains generally to aging methods suited to aerogel thin film fabrication, and particularly to techniques for improving gel strength and/or aerogel dielectric constant by a rapid aging technique, which avoid damage or premature drying of wet gel thin films during aging. A substrate having a wet gel thin film deposited thereon is contacted with a saturated water vapor atmosphere, preferably at an elevated pressure and a temperature greater than 100 DEG C. The method may comprise a vapor-phase exchange step to remove low boiling point pore liquids such as ethanol prior to or during aging. The method may also comprise a vapor-phase exchange step to replace water in the wet gel with another pore liquid such as acetone to stop the aging process and prepare the wet gel for drying. A vapor-phase aging catalyst (e.g. ammonia) may also be used to enhance the aging process. The present invention allows aging of wet gel thin films to be completed in a few minutes instead of the days generally required for conventional bulk gel aging.
|
申请公布号 |
US5753305(A) |
申请公布日期 |
1998.05.19 |
申请号 |
US19960748922 |
申请日期 |
1996.11.14 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
SMITH, DOUGLAS M.;JOHNSTON, GREGORY P.;ACKERMAN, WILLIAM C.;JENG, SHIN-PUU |
分类号 |
B01J13/00;C01B33/158;H01L21/314;H01L21/316;H01L21/768;(IPC1-7):B05D3/04;B05D3/00;B05D5/00;H01L21/00 |
主分类号 |
B01J13/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|