| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to secure the stable operating condition of an air guide bearing by removing the foreign matters on the guide surface. SOLUTION: This air guide bearing has a fixing part 17A having a guide surface 15a, and a guided surface 15b guided by the guide surface 15a, and it also has a movable part 17B to form a clearance between the guide surface 15a by blowing out a gas from a blowout hole 15 provided to the guided surface toward the guide surface 15a. In this case, a foreign matter removing mechanism 27 to suck the foreign matters on the guide surface 15a is provided to the movable part 17B. When the movable part 17B is moved in the condition operating the foreign matter removing mechanism 27, the foreign matters existing on the guide surface 15a are sucked and moved.</p> |
