SEMICONDUCTOR SPINNER EQUIPMENT AND POST EXPOSURE BAKING METHOD USING THE SAME

摘要

A semiconductor spinner apparatus and a post exposure baking method using the same are provided to shorten efficiently a post exposure baking delay time by performing respectively wafer loading/unloading processes. A post exposure baking unit bakes a wafer at a constant level of temperature. A first transfer unit(310) loads the wafer into the post exposure baking unit. A second transfer unit(320) unloads the baked wafer from the post exposure baking unit. A standby unit is installed around the post exposure baking unit. The first transfer unit is in a standby state in the standby unit. A control unit controls the first transfer unit in the standby state, and controls transferring operations of the first and second transfer units.