发明名称 Polishing slurry
摘要 <p>Provided is a high purity polishing slurry which provides a material to be polished with a high scratch resistance and has a high polishing efficiency and which less contaminates the material to be polished. The polishing slurry comprises water and silica particles dispersed in water, wherein the above silica particles have an average primary particle size of 50 to 300 nm and a refractive index of 1.41 to 1.44 and are synthesized in a liquid phase and produced without passing through a drying step; and the K value is 5 x 10&lt;-6&gt; mol/m&lt;2&gt; or more.</p>
申请公布号 EP1020500(B1) 申请公布日期 2004.09.22
申请号 EP20000100166 申请日期 2000.01.11
申请人 TOKUYAMA CORPORATION 发明人 TATEYAMA, YOSHIKUNI;YAMAMOTO, KATSUMI;KATO, HIROSHI;HAYASHI, KAZUHIKO;KONO, HIROYUKI
分类号 B24B37/00;C09G1/02;C09K3/14;H01L21/304;(IPC1-7):C09G1/02 主分类号 B24B37/00
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