| 摘要 |
A stock system and a method for controlling the same are provided to improve space efficiency of a stock system by forming a buffer stage in input and output ports in vertically laminated structure. A stock system includes an input port, a plurality of shelves, an output port, a rack master, and a plurality of buffer ports. Cassettes loaded with substrates are put in and taken out through the input and the output ports. The shelves store the cassettes. The rack master transports the cassettes by moving between the input port and the shelves and between the shelves and the output port. The buffers for loading or unloading the cassettes are vertically stacked in the output and the input ports.
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