| 摘要 |
PROBLEM TO BE SOLVED: To precisely transfer patterns in a transfer apparatus and a transfer method for transferring micro-transfer patterns formed on a mold to an object to be molded. SOLUTION: The transfer apparatus 1 for transferring micro-transfer patterns formed on the mold M to the object W to be molded, has a closed space forming means for positioning a contact part TC1 in a closed space SP1 when bringing the mold M into mutual contact with the object to be molded for transfer, and a pressure reducing means for deforming the object to be molded by reducing the pressure in the closed space SP1 formed by the closed space forming means and equalizing the pressure in a contact part TC2. COPYRIGHT: (C)2008,JPO&INPIT
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