| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating unit which removes efficiently small lumps produced in the coating solution, uniforming the flow rate of the coating solution supplied from the bottom of the coating vessel and enables uniform coating. SOLUTION: The coating unit has a coating vessel 10 in which a material is immersed in a coating solution 26 to coat the material, a coating solution injection/discharge section 16 in which a coating injection section 12 folded at a predetermined angle is incorporated into a coating solution discharge section 14 in an integrated way, a coating solution reservoir tank 18 which stores temporarily the coating solution 26 having overflowed the coating vessel 10, and a coating solution recovery tank 20 recovering and circulating the coating solution 26 in the coating solution discharge section 14 and the coating solution reservoir tank 18. COPYRIGHT: (C)2008,JPO&INPIT
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