发明名称 DRIVE UNIT AND PLANAR MOTOR USING SAME, AND EXPOSURE APPARATUS USING PLANAR MOTOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a drive unit which keeps a coil in a cooled state at a low temperature by suppressing intrusion of heat into the coil and absorbs thermal shrinkage at the time of cooling the coil and thermal expansion at the time of returning the coil into normal temperature and can obtain an appropriate supportive rigidity against the reaction force generated in the coil. <P>SOLUTION: The drive unit includes a movable member and a stator. The stator includes a coil, a coil holding member for holding the coil, a cooling means for cooling the coil, a supporting member for supporting the coil holding member movably in a first direction and in a second direction, a restricting member which restricts the movement of the coil holding member in the first direction and allowing it to move in the second direction, and a pressing means for pressing the coil holding member against the restricting member. Besides, a second restricting member for restricting the movement of the coil holding member in the second direction and allowing it to move in the first direction and a second pressing means for pressing the coil holding member against the second restricting member may be additionally included. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009060773(A) 申请公布日期 2009.03.19
申请号 JP20070228543 申请日期 2007.09.04
申请人 CANON INC 发明人 ITO ATSUSHI
分类号 H02K41/02;H01L21/027;H02K41/03 主分类号 H02K41/02
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