发明名称 DICING SHEET, DICING/DIE-BONDING FILM, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 Provided is a dicing sheet and a dicing/die-bonding film with which it is possible to eliminate sagging of the dicing sheet and to prevent contact between semiconductor elements. The present invention relates to a dicing sheet that contracts as a result of being heated for 1 minute at 100°C, with a second length in the MD direction after heating being 95% or less of 100% of a first length in the MD direction before heating. The dicing sheet is provided with a substrate, and a pressure-sensitive adhesive layer disposed on the substrate. The dicing/die-bonding film is provided with the dicing sheet, and an adhesive layer disposed on the pressure-sensitive adhesive layer.
申请公布号 WO2016093308(A1) 申请公布日期 2016.06.16
申请号 WO2015JP84644 申请日期 2015.12.10
申请人 NITTO DENKO CORPORATION 发明人 SHISHIDO, YUICHIRO;MISUMI, SADAHITO;ONISHI, KENJI;YANAGI, YUICHIRO
分类号 H01L21/301;C09J7/02;H01L21/52 主分类号 H01L21/301
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