| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotary cathode capable of smoothly exchanging a power supply brush, and a sputtering apparatus equipped with the rotary cathode.SOLUTION: A rotary cathode includes a body part 22 having an opening at one side face, a drive unit that is installed outside the body part 22 and has an output shaft at a location opposite to the opening, a rotation shaft that is rotatably supported in the body part 22 and is arranged parallel to the output shaft, a target that is linked to the rotation shaft and rotates with the rotation shaft, a belt 35 that connects the output shaft and the rotation shaft through the opening and rotates the rotation shaft, and a power supply unit that is equipped with a power supply brush 38 contacting the outer periphery surface of the rotation shaft, extending from the inside of the body part 22 to the outside of the body part, and is constructed movably back and forth in the body part 22 through the opening.SELECTED DRAWING: Figure 4 |
