| 发明名称 | Photoreflectance device | ||
| 摘要 | A photoreflectance device for characterizing a rough surface includes a pump beam emitter to emit a pump beam; a probe beam emitter to emit a probe beam; a detector to detect the probe beam reflected by the surface; an integrating sphere to collect the probe beam reflected by the surface, the integrating sphere including: a first output connected to the detector, and disposed so as to receive a majority of the probe beam reflected by the surface; a second output arranged so as to receive a majority of the pump beam reflected by the surface. | ||
| 申请公布号 | US9377300(B2) | 申请公布日期 | 2016.06.28 |
| 申请号 | US201314651414 | 申请日期 | 2013.12.09 |
| 申请人 | NEXCIS;UNIVERSITE D'AIX-MARSEILLE | 发明人 | Moreau Antonin;Bermudez Véronica;Escoubas Ludovic;Simon Jean-Jacques |
| 分类号 | G01B11/30;G01N21/17 | 主分类号 | G01B11/30 |
| 代理机构 | Pillsbury Winthrop Shaw Pittman LLP | 代理人 | Pillsbury Winthrop Shaw Pittman LLP |
| 主权项 | 1. A photoreflectance device for characterising a rough surface, comprising: a pump beam emitter configured to emit a pump beam; a probe beam emitter configured to emit a probe beam; a detector configured to detect a beam reflected by the surface, and an integrating sphere that is disposed so as to collect the probe beam reflected by the surface, the integrating sphere including: a first output to which the detector is connected, the first output being disposed so as to receive a majority of the probe beam reflected by the surface;a second output arranged so as to receive a specular reflection from the pump beam reflected by the surface. | ||
| 地址 | Rousset FR | ||