DEEP GATE-ALL-AROUND SEMICONDUCTOR DEVICE HAVING GERMANIUM OR GROUP III-V ACTIVE LAYER

摘要

Deep gate-all-around semiconductor devices having germanium or group III-V active layers are described. For example, a non-planar semiconductor device includes a hetero-structure disposed above a substrate. The hetero-structure includes a hetero-junction between an upper layer and a lower layer of differing composition. An active layer is disposed above the hetero-structure and has a composition different from the upper and lower layers of the hetero-structure. A gate electrode stack is disposed on and completely surrounds a channel region of the active layer, and is disposed in a trench in the upper layer and at least partially in the lower layer of the hetero-structure. Source and drain regions are disposed in the active layer and in the upper layer, but not in the lower layer, on either side of the gate electrode stack.

主权项

1. A non-planar semiconductor device, comprising:
a buffer layer disposed above a substrate: an active layer disposed above the buffer layer; a gate electrode stack disposed on and completely surrounding a channel region of the active layer, and disposed in a trench in the butler layer; source and drain regions disposed adjacent the channel region, on either side of the gate electrode stack; and isolation regions adjacent the source and drain regions and disposed at least partially into the buffer layer, wherein the gate electrode stack is disposed to a depth in the buffer layer deeper than a depth of the isolation regions.