发明名称 ANGULAR VELOCITY DETECTION ELEMENT, ANGULAR VELOCITY DETECTION DEVICE, ELECTRONIC APPARATUS AND MOBILE BODY
摘要 PROBLEM TO BE SOLVED: To provide an angular velocity detection element capable of reducing generation of noise and reducing decrease in detection accuracy, an angular velocity detection device, an electronic apparatus and a mobile body.SOLUTION: A gyro element 1 includes: a base part 21; vibration arms 22, 23 connected to the base part 21; drive piezoelectric elements 31, 32, 33, 34 disposed on the vibration arms 22, 23 and vibrating the arms in a flexural manner in a drive vibration mode with the same phases along an X axis and opposite phases along a Z axis; and detection piezoelectric elements 61, 62 mounted on the vibration arms 22, 23 and detecting an angular velocity around a detection axis. When the vibration arms 22, 23 are vibrated in a flexural manner in a drive vibration mode, the detection piezoelectric elements 61, 62 generate signals with opposite phases; and when an angular velocity ωy is added while the drive arms 22, 23 are vibrated in a flexural manner in the drive vibration mode, the detection piezoelectric elements 61, 62 generate signals with the same phase.SELECTED DRAWING: Figure 1
申请公布号 JP2016176892(A) 申请公布日期 2016.10.06
申请号 JP20150059147 申请日期 2015.03.23
申请人 SEIKO EPSON CORP 发明人 NAKAGAWA HIROSHI
分类号 G01C19/5621;H01L41/053;H01L41/113;H01L41/311 主分类号 G01C19/5621
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