发明名称 BOARD SUCTION HOLDING STAGE AND PRINTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a board suction holding stage capable of peeling a board stably in safety without breaking, even if the board is fragile and sticking to a surface plate while being charged electrostatically, and to provide a printing device including the same.SOLUTION: A board suction holding stage includes a surface plate for holding a board, a lift pin penetrating the surface plate so as to move the board up and down, a plurality of suction holes for sucking gas from the surface of the surface plate so as to suck the board thereto, a plurality of floatation holes for blowing gas from the surface of the surface plate so as to float the board therefrom, and a function for blowing gas from the floatation holes, at an intermediate position in a range where the lift pin can move up and down without breaking the board.SELECTED DRAWING: Figure 4
申请公布号 JP2016197620(A) 申请公布日期 2016.11.24
申请号 JP20150075766 申请日期 2015.04.02
申请人 TOPPAN PRINTING CO LTD 发明人 AKAO SOSUKE
分类号 H01L21/683 主分类号 H01L21/683
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