发明名称 |
Semiconductor device and method of manufacturing the same |
摘要 |
A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a core insulating film, a channel film surrounding the core insulating film and extending to a higher level than an upper surface of the core insulating film to have a first end of the channel film exposed over the core insulating film, a channel pad formed over an inner wall of the first end of the channel film exposed over the core insulating film, and a contact plug coupled to the channel pad. |
申请公布号 |
US9520408(B2) |
申请公布日期 |
2016.12.13 |
申请号 |
US201514698571 |
申请日期 |
2015.04.28 |
申请人 |
SK Hynix Inc. |
发明人 |
Kim Tae Kyung |
分类号 |
H01L21/20;H01L27/115;H01L23/528;H01L23/535;H01L21/768 |
主分类号 |
H01L21/20 |
代理机构 |
IP & T Group LLP |
代理人 |
IP & T Group LLP |
主权项 |
1. A semiconductor device, comprising:
a core insulating film; a channel film surrounding the core insulating film and extending to a higher level than an upper surface of the core insulating film to have a first end of the channel film exposed over the core insulating film; a channel pad formed over an inner wall of the first end of the channel film exposed over the core Insulating film; and a contact plug coupled to the channel pad. |
地址 |
Gyeonggi-do KR |