发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a core insulating film, a channel film surrounding the core insulating film and extending to a higher level than an upper surface of the core insulating film to have a first end of the channel film exposed over the core insulating film, a channel pad formed over an inner wall of the first end of the channel film exposed over the core insulating film, and a contact plug coupled to the channel pad.
申请公布号 US9520408(B2) 申请公布日期 2016.12.13
申请号 US201514698571 申请日期 2015.04.28
申请人 SK Hynix Inc. 发明人 Kim Tae Kyung
分类号 H01L21/20;H01L27/115;H01L23/528;H01L23/535;H01L21/768 主分类号 H01L21/20
代理机构 IP & T Group LLP 代理人 IP & T Group LLP
主权项 1. A semiconductor device, comprising: a core insulating film; a channel film surrounding the core insulating film and extending to a higher level than an upper surface of the core insulating film to have a first end of the channel film exposed over the core insulating film; a channel pad formed over an inner wall of the first end of the channel film exposed over the core Insulating film; and a contact plug coupled to the channel pad.
地址 Gyeonggi-do KR