| 摘要 |
<P>PROBLEM TO BE SOLVED: To keep air-tightness in a box wherein electric leads penetrate. <P>SOLUTION: A laminated body 23 is constituted by laminating members 31-43. The laminated body 23 has a frame body 24 and a reation device main part 25 arranged at the inside of the frame body 24. An upper lid material 21 is joined on the frame body 24, a lower lid material 22 is joined under the frame body 24 and the box is constituted by these. Electric patterns 68 and 69 are patterned on the under surface of the reaction device main part 25 and also a getter material 77 is housed in the box. The electric leads 61-66 are connected to the electric patterns 68 and the getter material 77 and the electric leads 61-66 penetrate the box. Its through part is closed by a polyimide sealing material 67. <P>COPYRIGHT: (C)2009,JPO&INPIT |
