摘要 |
PURPOSE:To uniformalize a laser beam and to lower the power density of an exit side condenser system so as to prevent the failure of the condenser system by subjecting the front end on the exit side of a kaleidoscope to microvibration. CONSTITUTION:The incident side of the kaleidoscope 13 coated with a dielectric thin film having a small absorption loss at the wavelength of the laser beam is fixed together with an incident lens 12. The laser energy with which a metallic surface is irradiated is uniformalized if only the exit side of the kaleidoscope 13 is subjected to the microvibration. The laser energy with which the work is irradiated is uniformalized even if the exit side of the kaleidoscope 13 and the exit side lens 14 are integrated and are vibrated together with the exit side lens 14. |