| 摘要 |
Provided is a substrate transfer robot, in which a contact type vacuum seal portion is cooled so that a vacuum seal may not exceed a heat resisting temperature thereby to prevent a drawback that the atmosphere leaks into a transfer chamber held gastight. In a drive apparatus for a substrate transfer robot for accommodating an arm group under a vacuum environment, a drive device (1) for driving a group of arms (40) rotationally is arranged over an atmosphere side and a vacuum side and is driven on the atmosphere side. The drive device is provided with a contact type vacuum seal (30) between a stationary member and an output member, and an oil seal (21) between the stationary member and the output member on the atmosphere side of the contact type vacuum seal. An annular space (50) is formed by the contact type vacuum seal and the oil seal between the stationary member and the output member. A feed port (51) of a coolant circulating passage from the atmosphere side to the annular space, and an exit port (52) of the coolant circulating passage from the annular space to the atmosphere side are individually formed in the stationary members. |
