发明名称 |
METHOD FOR WAVELENGTH COMPENSATION IN SEMICONDUCTOR MANUFACTURING |
摘要 |
The present invention relates to a method for manufacturing a plurality of semiconductor photonic integrated circuit comprising at least a laser and a modulator connected optically to one another. Each laser and modulator has a waveguide layer being implemented on a single substrate, where said modulator is formed by use of a selective area growth technique. By providing modulator masking parts with selectable width to compensate a difference in band-gap energy in the waveguide layer between the laser and the modulator an approximate uniform difference in band-gap energy between the optically connected laser and modulator may be obtained.
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申请公布号 |
WO0038284(A1) |
申请公布日期 |
2000.06.29 |
申请号 |
WO1999SE02377 |
申请日期 |
1999.12.15 |
申请人 |
TELEFONAKTIEBOLAGET LM ERICSSON (PUBL) |
发明人 |
BENDZ, ESKIL;LUNDQVIST, LENNART |
分类号 |
H01L33/00;H01S5/026;H01S5/20;(IPC1-7):H01S3/18 |
主分类号 |
H01L33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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