发明名称 Testing device and testing method of a semiconductor device
摘要 A testing device can perform a test on an arbitrary one of a plurality of semiconductor devices by pressing the semiconductor devices onto a contactor from a back side of the semiconductor device. A test circuit board has a contactor provided with contact pieces corresponding to external connection terminals of semiconductor devices to be tested. A support board is capable of mounting the semiconductor devices thereon in an aligned state. A stage supports the support board. A press head presses the semiconductor devices to be tested mounted on the support board so as to cause external connection terminals of the semiconductor devices to be tested to contact with the contact pieces of the contactor. The stage is movable to a position at which at least one of the semiconductor devices to be tested, which are mounted on the support board, faces the contactor.
申请公布号 US2006220667(A1) 申请公布日期 2006.10.05
申请号 US20050211094 申请日期 2005.08.25
申请人 FUJITSU LIMITED 发明人 TASHIRO KAZUHIRO;ITOU YASUYUKI;MARUYAMA SHIGEYUKI;ARISAKA YOSHIKAZU
分类号 G01R31/02 主分类号 G01R31/02
代理机构 代理人
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