| 摘要 |
A surface defect detection method and a surface defect inspection apparatus are provided having a function of inspecting only the defects and foreign particles on the surface regardless of whether or not there are internal defects, internal foreign particles, or internal light scattering particles, even if the inspection target material is a transparent or translucent material, or a material containing internal crystals such as crystallized glass. A medium layer having a higher refractive index than that of the inspection target material is provided to be in contact with the inspection target surface of the inspection target material. Inspection light is input from the medium layer side with an incident angle that achieves total reflection on the interface between the medium layer and the inspection target surface, and the reflected light of the inspection light, which is reflected by the inspection target surface, is detected, thereby inspecting for surface defects and foreign particles on the inspection target surface.
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