THE BAND-STOP FILTER DEVICE IN GHZ FREQUENCY RANGE USING FERROMAGNETIC RESONANCE OF THE MAGNETIC FILM

摘要

A band-stop filter device in a GHz frequency range using a ferromagnetic resonance of a magnetic film is provided to select a frequency band by adjusting a size of the magnetic film. A band-stop filter device in a GHz frequency range using a ferromagnetic resonance of a magnetic film includes a glass substrate(10), a Cu/Ti seed layer(20), a Cu coplanar waveguide, an insulator(40), and a magnetic film(50). A band-stop filter is formed on the glass substrate. The Cu/Ti seed layer is deposited on the glass substrate, and is formed at a thickness of 1000Å and 100Å by a radio frequency sputtering to increase an adhesive of a coplanar waveguide and the glass substrate. The Cu coplanar waveguide is formed on the Cu/Ti seed layer and has a coplanar signal line and first and second coplanar ground lines. The coplanar signal line is provided as an input unit and an output unit. The first and second coplanar ground lines are formed on the Cu/Ti seed layer. The insulator is formed on the coplanar signal line and is coated with a polyimide or a silicon oxide under a nitrogen atmosphere between the coplanar signal line and the magnetic thin film. The magnetic thin film is formed on the insulator, and is formed on a corresponding region to the coplanar waveguide or a micro strip line.