发明名称 RADIATION SENSITIVE SELF-ASSEMBLED MONOLAYERS AND USES THEREOF
摘要 The invention is directed to a radiation sensitive compound comprising a surface binding group proximate to one end of the compound for attachment to a substrate, and a metal binding group proximate to an opposite end of the compound. The metal binding group is not radiation sensitive. The radiation sensitive compound also includes a body portion disposed between the surface binding group and the metal binding group, and a radiation sensitive group positioned in the body portion or adjacent to the metal binding group. The surface binding group is capable of attaching to a substrate selected from a metal, a metal oxide, or a semiconductor material.
申请公布号 US2008318157(A1) 申请公布日期 2008.12.25
申请号 US20080199607 申请日期 2008.08.27
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 AFZALI-ARDANKANI ALI;KAGAN CHERIE R.;KOSBAR LAURA L.;SWANSON SALLY A.;SRINIVASAN CHARAN
分类号 G03F7/004;G03F7/20 主分类号 G03F7/004
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