发明名称 TEMPERATURE CONTROLLER, DEVICE MANUFACTURING DEVICE, EXPOSURE AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a temperature controller which is hardly affected by a fluctuation of an environment or a load, and can control a temperature stably. <P>SOLUTION: The temperature controller comprises: a heat exchanger 6 for conducting heat exchange between a primary coolant and a secondary coolant; a motor-operated valve 11 for changing a flow rate of the primary coolant flowing into the heat exchanger 6; and a feedback loop for controlling an opening of the motor-operated valve 11, thereby controlling a temperature of the secondary coolant flowing out of the heat exchanger 6. The feedback loop contains: a feedback control computing element 22 for determining the opening of the motor-operated valve 11 based on an error between a target temperature and a temperature of the secondary coolant flowing out of the heat exchanger 6; and a feedback control gain setter 24 for setting a gain of the feedback control computing element 22 according to the opening of the motor-operated valve 11. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008270566(A) 申请公布日期 2008.11.06
申请号 JP20070112291 申请日期 2007.04.20
申请人 CANON INC 发明人 MAKITA YOSHINORI
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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