VAPORIZER DELIVERY AMPOULE

摘要

A vaporizer delivery system (10) for use in semiconductor manufacturing processes including a plurality of vertically stacked containers (22) for holding a vaporizable source material. Each of the vertically stacked containers (22) includes a plurality of vented protuberances (30) extending into the interior (27) of the each stacked container (22) thereby providing channels for passage of a carrier gas between adjacent vertically stacked containers (22).