发明名称 |
NEGATIVE PANEL FIXING DEVICE AND METHOD FOR SPUTTERING |
摘要 |
The present invention relates to a device and a method to fixate an original plate panel for sputtering. The device to fixate the original plate panel for sputtering comprises: an upper plate jig arranged on a front surface of an original plate panel provided with a protruding panel edge portion finished with a sealant and divided into a plurality of cells to fixate the original plate panel, and provided with a first slit disposed adjacent to an upper edge, a lower edge, and both side edges of each cell and penetrated in a thickness direction; a mask strip extended in a horizontal direction of the upper plate jig, separated from a rear surface of the upper plate jig in a vertical direction to be detachably mounted while forming a plurality of lines, and provided with a second slit smaller than the first slit formed on a position corresponding to the first slit; and a lower plate jig having a plurality of closed cell areas and open cell areas for each cell formed on a front surface thereof supporting a rear surface of the original plate panel, and a plurality of magnetic bodies arranged on a rear surface thereof, separated from each other, and replaceably mounted on the rear surface thereof. A stepped portion having an area greater than a flat surface of the first slit is formed between the first slit and the upper plate jig. |
申请公布号 |
KR101638344(B1) |
申请公布日期 |
2016.07.11 |
申请号 |
KR20150172120 |
申请日期 |
2015.12.04 |
申请人 |
YU-IN PRECISION OPTICAL CO., LTD. |
发明人 |
KIM, WON JUNG;DO, YOUNG HO;SONG, HEE SOO |
分类号 |
C23C14/50;C23C14/00;C23C14/34;C23C14/54 |
主分类号 |
C23C14/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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