| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure a residual stress of a fine part smaller than a cross-sectional diameter of an X-ray.SOLUTION: A diffraction ring is formed using a diffraction ring formation device including: an X-ray emitter 10 for emitting an X-ray to a measurement object OB; a table 16 in which a through-hole through which the X-ray passes is formed in the center; and an imaging plate 15 attached to the table 16, receiving a diffraction X-ray and recording the diffraction ring. In this case, a slit SL having a width smaller than a cross-sectional diameter of the X-ray is formed on a surface of the measurement object OB, and a position and an attitude of the measurement object OB are adjusted in such a way that a measurement location inside the slit SL is irradiated with the X-ray, a center line of the slit SL is substantially included in a plane including an optical axis of the X-ray and a rotation reference position of the imaging plate 15, the surface of the measurement object OB of a slit SL portion becomes vertical to this plane. After this, the measurement object B is irradiated with the X-ray, and the diffraction ring is formed on the imaging plate 15. |
