发明名称 X線検査装置
摘要 PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of photographing an outward appearance image of the entire region of an object to be inspected.SOLUTION: There is provided an X-ray inspection device 10 including: a stage 3 which is provided between an X-ray generation device 1 and an X-ray detector 2 arranged opposite each other and on which an object W to be inspected is placed; a moving mechanism 4 which moves the stage 3 in three axis directions including an X-ray optical-axis direction; a fluoroscopic image acquisition unit 21a which acquires a fluoroscopic image of a partial region of the object W to be inspected; an optical camera 5 which photographs an outward appearance image of the entire region of the object W to be inspected from the optical-axis direction; an outward appearance image display control unit 21b which displays the outward appearance image on a display unit 23; and a moving mechanism control unit 21c which drives the moving mechanism 4 so as to acquire a fluoroscopic image including a desired position on the outward appearance image as the desired position is specified. The outward appearance image display control unit 21b makes the optical camera 5 photograph the outward appearance image after moving the stage 3 in the X-ray optical axis direction on the basis of a height (h) of the object W to be inspected once the height (h) is input.
申请公布号 JP5950100(B2) 申请公布日期 2016.07.13
申请号 JP20120131676 申请日期 2012.06.11
申请人 株式会社島津製作所 发明人 岩尾 快彦
分类号 G01N23/04;G01B11/00 主分类号 G01N23/04
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