TRANSFER DEVICE AND VACUUM APPARATUS

摘要

The present invention provides a system that facilitates positioning operations and also improves throughput in transferring a substrate in a transfer device that can transfer a pair of transfer objects simultaneously. The present invention includes first and second extension/contraction drive shafts disposed concentrically with a rotating axis as a center, each provided in an independently rotatable manner in a horizontal plane, and first and second turning drive shafts. First and second transfer mechanisms are disposed on both sides of a transfer object transfer direction with the rotating axis being disposed therebetween, are driven to extend and contract by the first and second extension/contraction drive shafts, and transfer a transfer object along the transfer object transfer direction. The first and second transfer mechanisms are configured to turn at a small angle with the rotating axis as a center by first and second turning drive members.

主权项

1. A transfer device, comprising:
first and second extension/contraction drive shafts for driving extension and contraction of first and second transfer mechanisms, the first and second extension/contraction drive shafts being disposed concentrically about a predetermined rotating axis as a center and each being provided in an independently rotatable manner in a horizontal plane; and first and second turning drive shafts for turning the first and second transfer mechanisms, the first and second turning drive shafts being disposed concentrically about the first and second extension/contraction drive shafts, wherein the first transfer mechanism is configured to be driven to extend and contract by the first extension/contraction drive shaft so as to transfer a first transfer unit along a transfer object transfer direction, and the second transfer mechanism is configured to be driven to extend and contract by the second extension/contraction drive shaft so as to transfer a second transfer unit along the transfer object transfer direction, wherein the first and second transfer mechanisms have first and second turning drive members that are driven by the first and second turning drive shafts, respectively, and turn the first and second transfer mechanisms, respectively, about the rotating axis as a center, and wherein the first transfer mechanism and the second transfer mechanism are disposed opposite to each other in the transfer object transfer direction with the rotating axis in between.