| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device measurement device with which, when installing a plurality of electrodes within a sample and performing the measurement of a semiconductor device, it is possible to protect a reverse electrode from the inflow of a large current even when shorting occurs due to contact between an electrode other than the reverse electrode and a probe electrode.SOLUTION: Provided is a semiconductor device measurement device comprising: at least one first electrode with which it is possible to apply a voltage to a sample to be measured, a second electrode for applying a voltage to the sample to be measured and sending a current through the sample to be measured to a probe brought into contact with the sample to be measured, and a current limiting circuit for limiting the current flowing from the first electrode to the probe when the voltage is applied from the first electrode to the sample to be measured.SELECTED DRAWING: Figure 1 |
