发明名称 Method for processing a carrier and an electronic component
摘要 In various embodiments, a method for processing a carrier is provided. The method for processing a carrier may include: forming a first catalytic metal layer over a carrier; forming a source layer over the first catalytic metal layer; forming a second catalytic metal layer over the source layer, wherein the thickness of the second catalytic metal layer is larger than the thickness of the first catalytic metal layer; and subsequently performing an anneal to enable diffusion of the material of the source layer forming an interface layer adjacent to the surface of the carrier from the diffused material of the source layer.
申请公布号 US9449873(B2) 申请公布日期 2016.09.20
申请号 US201313921284 申请日期 2013.06.19
申请人 INFINEON TECHNOLOGIES AG 发明人 Ruhl Guenther;Pruegl Klemens
分类号 H01L21/768;H01L23/498;H01L29/66;H01L29/778;H01L29/10;H01L29/16 主分类号 H01L21/768
代理机构 代理人
主权项 1. A method for processing a carrier, the method comprising: forming a first catalytic metal layer over a carrier; forming a source layer over the first catalytic metal layer, forming a second catalytic metal layer over the source layer, wherein a thickness of the second catalytic metal layer is larger than a thickness of the first catalytic metal layer; and subsequently performing an anneal enabling diffusion of a material of the source layer so as to form an interface layer adjacent to the surface of the carrier from the diffused material of the source layer; and adapting the thickness of the catalytic metal layers, the thickness of the source layer, and the anneal such that a conformal interface layer is formed during the anneal, the conformal interface layer having a two dimensional lattice structure.
地址 Neubiberg DE