| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for feeding a hydrogen selenide mixed gas for a solar cell capable, on an occasion for storing, within a buffer tank, a hydrogen selenide mixed gas adjusted at a specified concentration following the mixing of an inert gas with a 100% hydrogen selenide gas and for feeding the hydrogen selenide mixed gas from the buffer tank, of mitigating, even if the capacity of the buffer tank is low, the variation of the hydrogen selenide concentration within the hydrogen selenide mixed gas immediately after the commencement of feeding while inhibiting a drift phenomenon.SOLUTION: The concentration of a mixed gas following the mixing of an inert gas with a 100% hydrogen selenide gas is measured, whereas not only is the flow rate of either or both of the inert gas and the 100% hydrogen selenide gas controlled depending on the concentration of the mixed gas but the pressure of the mixed gas within a buffer tank where the mixed gas is stored is also measured, and the respective flow rates of the inert gas and the 100% hydrogen selenide gas are controlled depending on the measured pressure. |
