MEMS microphone device

摘要

A micro-electro-mechanical system (MEMS) microphone device is provided in the present disclosure. The MEMS microphone device includes a first electromagnetic shielding cover defining a first accommodating space; a second electromagnetic shielding cover received in the first accommodating space and defining a second accommodating space; a MEMS chip and an application specific integrated circuit (ASIC) chip received in the second accommodating space. The first electromagnetic shielding cover and the second electromagnetic shielding cover cooperatively provide dual electromagnetic shielding protection for the MEMS chip and the ASIC chip.

主权项

1. A micro-electro-mechanical system (MEMS) microphone device, comprising:
a first electromagnetic shielding cover defining a first accommodating space and having a plurality of sidewalls and an upper wall connecting with the sidewalls; a second electromagnetic shielding cover received in the first accommodating space and having a plurality of sidewalls and an upper wall connecting with the sidewalls, the sidewalls and the upper wall of the second electromagnetic shielding cover separated from that of the first electromagnetic shielding cover, the second electromagnetic shielding cover defining a second accommodating space; and a MEMS chip and an application specific integrated circuit (ASIC) chip received in the second accommodating space; wherein the first electromagnetic shielding cover and the second electromagnetic shielding cover cooperatively provide dual electromagnetic shielding protection for the MEMS chip and the ASIC chip.