CONTROL SYSTEM, POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD.

摘要

The present invention relates to a control system configured to control a parameter (F) of a dynamic system, wherein the parameter depends on an output signal (g(F(k))). The control system comprises a set-point generator and a feedforward, wherein the setpoint generator is arranged to provide a set-point signal (F(k)) to the feedforward. The feedforward is arranged to provide the output signal based on the set-point signal, wherein the feedforward is arranged to perform a non-linear operation on the set-point signal. The non-linear operation is based on a non-linear functional relationship between the output signal and the parameter.