| 摘要 |
<p>PURPOSE:To position a wafer while conveying it by running two traveling bodies, which travel with conveying the wafer, in the relatively inverse directions or rotating the wafer with a speed difference. CONSTITUTION:Belts 2, 3 travel in the same direction and convey a wafer 7 in the predetermined conveying direction. The wafer 7 advances between guide bodies 10, 10 of a wafer guide, so that its outer circumferential face 14 is brought into contact with the guide bodies 10, 10. When the wafer 7 reaches a luminous element 12, light from luminous bodies 13... is intercepted, so that the outer circumference end of the wafer 7 is recognized on the basis of the detected result of a position sensor 5. Then, the position of the wafer 7 is detected by using an orientation flat. When the wafer 7 is conveyed with deviating, the belts 2, 3 travel in the inverse directions to each other so that the rotational force acts so as to rotate the wafer 7. After the wafer 7 is positioned on the basis of the orientation flat and the positioning is finished, the belts 2, 3 travel in the same direction.</p> |
