发明名称 EPITAXIAL WAFER AND LIGHT-EMITTING DIODE THEREOF
摘要 PROBLEM TO BE SOLVED: To obtain an ultra-thin high-emitting diode of a structure, wherein the generation of a defective ohmic electrode is inhibited, and an epitaxial wafer for the light-emitting diode. SOLUTION: This epitaxial wafer has a structure, such that epitaxial layers 3 to 6 are formed on the main surface of a compound semiconductor single- crystal substrate 2. In this case, the epitaxial layer 3a of the epitaxial layer 3 on the main surface is exposed on the side of the rear of the substrate 2, and the carrier concentration in the exposed part 8 of the epitaxial part 3a is 1&times;10<17> cm<-3> to 2&times;10<18> cm<-3> .
申请公布号 JPH11317542(A) 申请公布日期 1999.11.16
申请号 JP19980136073 申请日期 1998.04.30
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 TAKAHASHI TORU;HIGUCHI SUSUMU
分类号 H01L33/12;H01L33/30;H01L33/36 主分类号 H01L33/12
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