| 摘要 |
A microelectromechanical device with integrated control of a flow of a fluid has a first sheet (1) and a second sheet (2) which are arranged on each other and interconnected. The first sheet (1) has, in its surface engaging the second sheet (2), a flow duct system (9) for the fluid. Further the device has an inlet (10) to the flow duct system, an outlet (11) from the flow duct system and at least one microsensor (17a), which is mounted in the flow duct system (9) and arranged to react to the fluid. The first sheet (1) has a first layer (3) of polymer material which engages the second sheet (2) and in which the flow duct system (9) is formed, and an electrically conductive layer (5) on which the layer of polymer material is formed and which is quickly heatable so as to quickly heat the fluid in the flow duct system (9) by heat conduction.
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