| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS switch which is easy and delicate to manufacture and in which a sufficient ON/OFF electrostatic capacity variation ratio can be obtained. SOLUTION: This is the MEMS switch which comprises a substrate 46, a conductive beam 42 formed on the surface of the substrate, and a three-layer structural beams B1, B2 which are formed on the surface of the substrate and arranged at a position opposed to the conductive beam. The three-layer structural beam includes first conductive layers 38, 40, second conductive layers 30, 32, and dielectric layers 34, 36 interposed between the first conductive layers and the second conductive layers. The first conductive layers are opposed to the conductive beam 42 and at least one of the conductive beam 42 and the three-layer structural beam is displaced by electrostatic force on the surface parallel to the substrate 46, and the conductive beam 42 and the first electrodes 38, 40 can contact. When the conductive beam 42 and the first conductive layers contact, a conductive passage is formed between the conductive beam 42 and the second conductive layers 30, 32. COPYRIGHT: (C)2005,JPO&NCIPI
|
