发明名称 Cantilever and cantilever manufacturing method
摘要 A cantilever includes: a lever portion; a holder portion supporting the proximal end of the lever portion; a probe portion arranged at the distal end of the lever portion and having a spherical surface to face a sample; and a retaining portion fixed to the distal end of the lever portion and retaining the probe portion to surround a periphery of the probe portion. There is provided a cantilever allowing mounting of a probe portion with little effect in a short time without using any adhesive.
申请公布号 US2007214875(A1) 申请公布日期 2007.09.20
申请号 US20070709495 申请日期 2007.02.22
申请人 SHIGENO MASATSUGU;MATSUZAWA OSAMU;WATANABE NAOYA;NIHEI AMIKO;INOUE AKIRA;SHIRAKAWABE YOSHIHARU;MURAMATSU HIROSHI;YAMAMOTO YUJI 发明人 SHIGENO MASATSUGU;MATSUZAWA OSAMU;WATANABE NAOYA;NIHEI AMIKO;INOUE AKIRA;SHIRAKAWABE YOSHIHARU;MURAMATSU HIROSHI;YAMAMOTO YUJI
分类号 G01B21/30;G01Q60/38;G01Q70/00;G01R3/00;H01L21/306 主分类号 G01B21/30
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