发明名称 |
Cantilever and cantilever manufacturing method |
摘要 |
A cantilever includes: a lever portion; a holder portion supporting the proximal end of the lever portion; a probe portion arranged at the distal end of the lever portion and having a spherical surface to face a sample; and a retaining portion fixed to the distal end of the lever portion and retaining the probe portion to surround a periphery of the probe portion. There is provided a cantilever allowing mounting of a probe portion with little effect in a short time without using any adhesive.
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申请公布号 |
US2007214875(A1) |
申请公布日期 |
2007.09.20 |
申请号 |
US20070709495 |
申请日期 |
2007.02.22 |
申请人 |
SHIGENO MASATSUGU;MATSUZAWA OSAMU;WATANABE NAOYA;NIHEI AMIKO;INOUE AKIRA;SHIRAKAWABE YOSHIHARU;MURAMATSU HIROSHI;YAMAMOTO YUJI |
发明人 |
SHIGENO MASATSUGU;MATSUZAWA OSAMU;WATANABE NAOYA;NIHEI AMIKO;INOUE AKIRA;SHIRAKAWABE YOSHIHARU;MURAMATSU HIROSHI;YAMAMOTO YUJI |
分类号 |
G01B21/30;G01Q60/38;G01Q70/00;G01R3/00;H01L21/306 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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