MAGNETIC DEFLECTOR FOR AN ELECTRON COLUMN

摘要

A magnetic field deflector for the microelectronic column is provided to deflect the route of the electron beam to the fixed direction and deflect the electron beam to the magnetic field and/or the electric field. A magnetic field deflector for the microelectronic column comprises the core(12) consisting of the semiconductor or conductor; the deflector electrode(10) including the coil(11) that surrounds the core; at least one deflector electrode. At least two deflector electrodes are serially connected to each coil and are controlled identically. The deflector electrodes are arranged to be vertical to the electron beam passes.