| 摘要 |
<p>A reticle rotatable rack (4) is provided at an upper position, and a pod rotatable rack (6) is provided at a lower position in a clean stocker (2). A clean gas is supplied downwardly.
In the stocker, a pod transportation device (8) and a reticle transportation device (10) are elevated and lowered. Load ports (20,21), a pod opener (12), and the pod rotatable rack (6) are connected by the pod transportation device (8). The pod opener (12) and the reticle rotatable rack (4) are connected by the reticle transportation device (10).</p> |
