发明名称 |
Chuck for a photoresist spin coater |
摘要 |
A chuck for a photoresist spin coater has a bracket and a disk. The bracket is electrically conductive. The disk is mounted on the base, holds a glass substrate and is electrically conductive. Therefore, The disk allows static electricity on the disk to discharge to protect the glass substrate from being damaged by the static electricity when the glass substrate removes from the chuck.
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申请公布号 |
US2008029977(A1) |
申请公布日期 |
2008.02.07 |
申请号 |
US20060499131 |
申请日期 |
2006.08.03 |
申请人 |
PRIME VIEW INTERNATIONAL CO., LTD. |
发明人 |
CHENG JUI-CHUNG;CHANG CHIAN-SHENG |
分类号 |
B23B31/12 |
主分类号 |
B23B31/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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