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发明名称
Herstellung eines Halbleiterbauelements mit Luftspalten für niedrigstkapazitive Leiterbahnen
摘要
申请公布号
DE69840276(D1)
申请公布日期
2009.01.08
申请号
DE1998640276
申请日期
1998.01.21
申请人
GEORGIA TECH RESEARCH CORP.
发明人
KOHL, PAUL A.;ZHAO, QIANG;ALLEN, SUE ANN
分类号
C08F32/00;H01L21/768;H01L21/312;H01L21/56;H01L21/764;H01L23/29;H01L23/31;H01L23/522
主分类号
C08F32/00
代理机构
代理人
主权项
地址
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