Method and device for alignment of an optical imaging system

摘要

An optical imaging system is to be aligned with its optical axis in relation to a given alignment axis. For this, a radiation beam is emitted from one side of the imaging system along the alignment axis. In the direction of beam propagation, there is located behind the imaging system a pair of diaphragm elements, whose apertures are each covered by a piece of material transparent to the radiation, carrying a plurality of sensor elements arranged in a matrix. The sensor elements furnish information about the measured radiation intensity to a signal processing unit, which can graphically illustrate the current alignment status of the imaging system on a monitor and/or produce an automatic adjustment of the imaging system.

主权项

1. A method for alignment of an optical imaging system, comprising:
defining an alignment axis with at least a first diaphragm element, wherein the alignment axis connects an aperture of the first diaphragm element to a target located at a distance behind the first diaphragm element, a plurality of sensor elements disposed within a material covering the aperture of the first diaphragm element, the sensor elements arranged in a two-dimensional pattern within the aperture; aligning the optical imaging system relative to the alignment axis until radiation of a beam emitted along the alignment axis onto the imaging system after passing through the imaging system strikes the target through the aperture of the first diaphragm element, the material at least partially transparent to the radiation; performing, with the sensor elements, a first sensor detection of radiation in regard to the radiation of the beam within the aperture of the first diaphragm element; and providing sensor signals generated during the radiation detection to a signal processing unit.