发明名称 Non-invasive charged particle beam monitor
摘要 An electromagnetic wakefield detector placed in close proximity to a design trajectory of a non-relativistic charged particle beam produces an optical signal in response to passage of the charged particle beam without interrupting the charged particle beam. A photon detector receives the optical signal and produces a corresponding output. The wakefield detector may be based on the electro optic effect. Specifically, the detector may measure the effect of the charged particle beam a beam of radiation on the phase of radiation travelling parallel to the beam in a nearby electro optic waveguide. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
申请公布号 US9390887(B2) 申请公布日期 2016.07.12
申请号 US201414486739 申请日期 2014.09.15
申请人 KLA-Tencor Corporation 发明人 Plettner Thomas;Gerling John
分类号 H01J37/22;H01J37/28;H01J37/244 主分类号 H01J37/22
代理机构 JDI Patent 代理人 Isenberg Joshua D.;JDI Patent
主权项 1. A system, comprising: a) a set of one or more electro-optic (EO) materials placed in close proximity to a design trajectory of a charged particle beam; and b) a set of one or more optical probes configured to receive a beam of electromagnetic radiation and probe a change of refractive index of the one or more EO materials resulting from passage of the charged particle from the beam due to the electro-optic effect of the charged particle's electromagnetic field; and c) a set of one or more photon detectors coupled to the one or more optical probes, wherein each photon detector in the set is configured to produce a photon signal that corresponds to the change of refractive index of a corresponding EO material of the set of one of the one or more EO materials.
地址 Milpitas CA US